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发明名称
HALBLEITERVORRICHTUNG
摘要
申请公布号
DE3022122(A1)
申请公布日期
1980.12.18
申请号
DE19803022122
申请日期
1980.06.12
申请人
TOKYO SHIBAURA DENKI K.K., KAWASAKI, KANAGAWA (JAPAN)
发明人
NAKAMURA, JUNICHI;HATA, SEIJI;YAMASAKI, IWAO, KITAKYUSHU
分类号
H01L21/8224;H01L21/331;H01L27/082;H01L29/08;H01L29/72;H01L29/73;H01L29/735;(IPC1-7):H01L29/72
主分类号
H01L21/8224
代理机构
代理人
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地址
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