发明名称 Magnetic recording medium and method for fabricating the same
摘要 A magnetic recording medium which includes a non-magnetic base plate, a magnetic layer disposed on the base plate, and a carbon protective layer containing hydrogen disposed on the magnetic layer. The protective film may include a plurality of layers, including a first layer having a hydrogen content lower than a hydrogen content in a second layer disposed on the first layer. Alternatively, the carbon protective film may have a hydrogen content which gradually continuously increases from a bottom surface thereof to a top surface thereof. A method is also disclosed in which a non-magnetic base plate having a magnetic layer formed thereon is sputtered in a sputtering chamber having two spaced apart gas feed pipes connected thereto, wherein the base plate is moved from the first gas feed pipe to the second gas feed pipe, and the second gas feed pipe feeds a sputtering gas at a higher flow rate than the first gas feed pipe.
申请公布号 US5607783(A) 申请公布日期 1997.03.04
申请号 US19940255879 申请日期 1994.06.08
申请人 FUJI ELECTRIC CO., LTD. 发明人 ONODERA, KATSUMI
分类号 C23C14/06;C23C14/34;G11B5/64;G11B5/72;G11B5/73;G11B5/738;G11B5/84;(IPC1-7):G11B5/66 主分类号 C23C14/06
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