| 发明名称 |
Microchannel ion gun |
| 摘要 |
The present invention describes an ion gun which is capable of producing relatively high density ion currents. The ion gun employs at least one capillary duct the surface of which is semiconducting and has secondary electron emission coefficient greater than one to generate ions from a source of an ionizable material and to accelerate the ions so generated.
|
| 申请公布号 |
US4240007(A) |
申请公布日期 |
1980.12.16 |
| 申请号 |
US19790053496 |
申请日期 |
1979.06.29 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORP |
发明人 |
DREYFUS, RUSSELL W;MCCORKLE, RICHARD A;PENEBRE, NICHOLAS A |
| 分类号 |
B23K28/00;C08J7/00;H01J3/04;H01J27/02;H01J27/20;H01J37/08;H01J49/14;H01L21/265;(IPC1-7):H01J27/02;H01J43/02 |
主分类号 |
B23K28/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
