摘要 |
PURPOSE:To eliminate bad influence of overlapped field at the border of magnetic field and electric field, by forming an analyzing field with a magnetic field for separating an ion and converging on a face separated from the end face and a uniform electric field separated from the magnetic field for converging the radiated beam. CONSTITUTION:The analyzing field is formed with a magnetic field B for separating the ion produced from an ion source 1 in accordance with the number of mass and converging on a face gamma departed from end face beta, and a uniform electric field E separated from said magnetic field B for converging the ion beam radiating from said converging face gamma to one point through parabolic motion. A detection means C is arranged on said converging point D while means for sweeping the strength of uniform E is provided. Consequently the electric field E and the magnetic field B can be separated without sacrifice of the convergency of uniform electric field E, thereby bad influence due to overlapped field at the border of magnetic field and electric field can be eliminated. |