Heating reactor wall made from dielectric material - using heating element with internal resistance heater and outer sheath which when coiled serves as induction heater

摘要

Reactor wall of induction heated system is made of dielectric material and the inner part of the reactor is heated by an external HF coil. The coil also incorporates a resistance heating element and thus forms a composite with the outer sheath and the inner elements. The sheath of the coil is connected to the HF power supply. The inner element is connected to a power heating pack. The inner coil is made from Cr-Ni while the outer sheath is a Ni-Cr-Fe alloy i.e. stainless steel. Used for heating the reactor wall of a HF Plasma reactor in the region of the HF coil esp. for making high purity Si. Allows the reactors wall to be heated which is not affected by the high frequency field from the coil.