| 摘要 |
PURPOSE:To produce a dense sintered body of hyperfine particles having excellent heat resistance and wear resistance by carrying the hyperfine particle formed in a forming chamber to a sintering chamber given with a pressure difference, then depositing and sintering the same on a substrate kept at a specific temp. CONSTITUTION:The inside of the hyperfine particle forming chamber 1 and sintering chamber 2 connected by a carrying pipe 3 is evacuated to a vacuum and thereafter, gaseous N2, hydrocarbon, gaseous O2, etc., are introduced from cylinders 8, 8' into the forming chamber 1 from which these gases are discharged through the pipe 3 into the sintering chamber 2 so that the pressure difference is given between the forming chamber 1 and the sintering chamber 2. The raw material put into a crucible 5 disposed in the forming chamber 1 is then heated to evaporate by an induction coil 6 connected to an induction heating power supply 7 and is brought into reaction with the hydrocarbon to form the hyperfine particles. The hyperfine particles are introduced through the pipe 3 and a nozzle 19 into the sintering chamber 2 and are deposited on the substrate 9 kept at the temp. of 0.2-0.9 times the absolute temp. of the m. p. of the hyperfine particles by a heater 11 connected to a power supply 12. A laser beam 15 of a laser oscillator 13 connected to a power supply 14 is simultaneously irradiated thereon to sinter the deposited particle. |
