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发明名称
PURIFICATION OF SILICON
摘要
申请公布号
GB1581418(A)
申请公布日期
1980.12.10
申请号
GB19780019261
申请日期
1978.05.12
申请人
WACKER-CHEMITRONIC GES FUER ELEKTRONIK-GRUNDSTOFFE MBH
发明人
分类号
B01D11/02;C01B33/02;C01B33/037;H01L21/208;H01L31/04;(IPC1-7):C01B33/02
主分类号
B01D11/02
代理机构
代理人
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地址
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