发明名称
摘要 PROBLEM TO BE SOLVED: To deliver a work efficiently between a cassette and a processing section by providing a member for arranging a work delivered to 4 setter integrally therewith, and a transfer means for delivering a work positioned on the setter. SOLUTION: The setter 71 of any one of loader 11 or unloader 12 can be driven in the longitudinal direction, i.e., the central direction of a processor 1, the lateral direction intersecting the longitudinal direction, and the vertical direction intersecting the plane defined by the longitudinal and lateral directions. A member 76 for arranging a glass board P delivered to the setter 71 is provided integrally therewith. Furthermore, a transfer means 91 to be delivered with the glass board P arranged on the setter 71 or processed by the processor 1 is provided while being interlocked with the lateral movement of the setter 71. Consequently, the glass board P can be arranged on the setter 71 which can deliver the glass board P to the transfer means 91 while moving.
申请公布号 JP2859173(B2) 申请公布日期 1999.02.17
申请号 JP19950223857 申请日期 1995.08.31
申请人 SHIBAURA MEKATORONIKUSU KK 发明人 HIROSE HARUMICHI
分类号 G02F1/1333;B65G1/00;B65G49/07;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 G02F1/1333
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