| 发明名称 |
|
| 摘要 |
PURPOSE:To insert a substrate supporting arm easily a space beneath the substrate even if it is small to take out, position and convey the substrate easily. CONSTITUTION:A substrate supporting arm 23 supports a substrate W mounted on it in a horizontal posture and can be moved in a horizontal direction. A positioning guide which receives the end part of the substrate is provided only on the base end side of the substrate supporting arm 23. Further, a pressing member 26 is pressed against the outer circumferential edge part of the substrate W and the substrate W is slid toward the positioning guide side and stopped by the positioning guide for positioning. |
| 申请公布号 |
JP2859118(B2) |
申请公布日期 |
1999.02.17 |
| 申请号 |
JP19930345155 |
申请日期 |
1993.12.20 |
| 申请人 |
DAINIPPON SUKURIIN SEIZO KK |
发明人 |
SATO SEIYA;TSUJI MASAO;MIZOHATA YASUHIRO |
| 分类号 |
B65G49/07;G11B7/26;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
B65G49/07 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
