| 摘要 |
PURPOSE:To prevent the formation of defect in main electrode surface due to collision of ions, and to make possible the continuation of stable glow discharge for a long time even under high pressure of gas, by fitting a cylindrical auxiliary electrodes at a desired interval loosely to the periphery of exposed portion of the main electrode insulated from a reaction furnace body, and by fitting neutral electrodes loosely between both auxiliary electrodes in steps. CONSTITUTION:A magnetic cylinder 8 and an electroconductive annular material 5 are fitted at the upper part of a main electrode 2, and an auxiliary electrode 92, insulating material 11, neutral electrode 102, insulating material 11, neutral electrode 101, insulating material 11, and an auxiliary electrode 91 are fitted in turn around the cylinder 8. When the inside of the reaction furnace body 1 is evacuated to 1-10 Torr, a DC voltage is spplied between the body 1 and a nut 4 and is increased gradually. The body 1 and the electrode 91 serves as anodes, and the material 12 to be treated and the electrode 92 as cathode thereby producing electric discharge between the electrodes 91 and 92. With increase in voltage, the discharge is shifted to between the body 1 and the material 12 to be treated to form glow discharge on the surface of the material 12. Duration of the glow discharge raises the temp. of the electrode 92 and the material 12 by its heat energy, and ions are occluded on the surface of the material 12 to be treated. |
