Process and arrangement for the alignment of imaging systems

摘要

A process and apparatus for the alignment of the image plane of an imaging system with the interception plane of the image utilizing a measuring mark reproduced by at least two partial pupils of the imaging system. The two imaging beams associated with the partial pupils are distinguishable from one another and at least one partial pupil is moved over the full pupil of the imaging system. A minimum movement of the image of the measuring mark corresponds to alignment of the image and interception planes.