| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate the work for replacing siphon pipes and prevent the damage to component instruments by providing a start-up container for starting up the siphon pipe to a casing, connecting an exhaust pipe connecting to a vacuum exhaust system and a drain pipe whose lower end is water-sealed to the start-up container, inserting airtightly the outlet side of the siphon pipe into the start-up container. SOLUTION: A casing 14 is provided under a shield floor unit 2 as a treatment area 1. The lower part of a drive shaft 11 and a separate body 12 are housed rotatably in the casing 14. A start-up container 25 for starting a siphon pipe 20 is integrally provided to the casing 14. The siphon pipe 20 is shaped like a hollow cylinder. An exhaust pipe 26 connected to a vacuum exhaust system and a drain pipe 28 whose lower end is water-sealed in a receiving tank 27 are connected to the start-up container 25. By connecting the exhaust pipe 26 connected to the start-up container 25 to the vacuum exhaust system and evacuating the inside of the container 25 with the exhaust pipe 26 to drive the siphon pipe 20, the necessity of a piston is eliminated and simplify the structure of the device more suitable for replacement.</p> |
