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发明名称
摘要
申请公布号
JPS55169853(U)
申请公布日期
1980.12.05
申请号
JP19790070809U
申请日期
1979.05.25
申请人
发明人
分类号
C30B25/12;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C30B25/12
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代理人
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