| 摘要 |
In a solid-state image scanner which uses CCD(charge coupling device) for increasing light reception sensitivity and for stabilizing characteristics, An insulation layer(2) is formed on a semiconductor substance(1) and a transmission electrode(3) is arranged on the insulation layer. polycrystalline silicon layer which 10-50 atom % oxygen is doped to the insulation layer of the light reception layer is formed on the insulation layer.
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