| 摘要 |
PURPOSE:To shorten the time of work greatly by grasping a trimming position with accuracy by detecting the variation start position of the oscillation frequency of a crystal vibrator when the oscillation frequency of the crystal vibrator is adjusted by irradiating the crystal vibrator with a laser beam. CONSTITUTION:Crystal vibrator 1 is placed at a work position and the initial irradiation position of a laser beam is set at point 11. Next, the laser beam is made to scan from point 11 to point 12 linearly and when there is no variation in oscillation frequency between both the points, the scan is advanced from point 12 to point 13. Thus, when a change in frequency is obtained at point 20, the Y coordinate of point 20, namely, that of coarse-adjusting thin film 2 is stored and at the same time, the start Y coordinate of fine-adjusting thin film 3 is calculated by CPU in terms of only DELTAY. Next, the scan is taken from point 22 to point 31, and consequently coordinates of thin films 2 and 3 can be found. As a result, the time of work can remarkably be shortened by finding a trimming position with accuracy. |
