发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To preferably bond wires by moving a visual field of an identifying unit with predetermined moving type and repeatedly correcting the displacement of the visual field until a target to be identified is obtained in the visual field when the target cannot be caught at the reference position in the visual field. CONSTITUTION:Four points 8-1-8-4 separated at a distance of 1/2 of the size (X, Y) of a visual field are defined in directions X and Y from the reference position 8-0 of the visual field 8. An origin is initially located at the position 8-0, and moved to the position 8-1 when a target 6' cannot be identified in the visual field (in dotted area). If the target cannot be identified even in this field (shaded area), the origin is moved through the position 8-2, and the target can be eventually identified at the position 8-4. When the visual field is magnified by 4 times, the identifying time is not extended. In case that a plurality of identifying targets are employed, by using the displacement from the reference position of the target initially identified the reference position in the visual field after the second target is corrected, and the target should be found always at the reference position in the visual field as to the second and later targets so as to shorten the fully identifying time. In this manner, the targets are automatically identified to correct the displacement thereof so as to bond the wires.
申请公布号 JPS55154740(A) 申请公布日期 1980.12.02
申请号 JP19790062608 申请日期 1979.05.23
申请人 HITACHI LTD 发明人 TAKASUGI NOBUHIRO;KIYOUMASU RIYUUICHI
分类号 H01L21/00;H01L21/60;H01L21/68;H01L23/544 主分类号 H01L21/00
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