| 摘要 |
PURPOSE:To produce the substrate for gas sensors which is superior in thermal responsiveness and is stable in operating characteristic by providing a conductive layer for heating on the substrate, covering therein with an insulator thin film layer and connecting lead wires to said conductive layer. CONSTITUTION:Platinum lead wires 13a, 13b, 13c are placed on an insulation substrate (for example, alumina green sheet) 11, thence an insulation substrate 14 having through-holes 14a, 16b, 16c is superposed thereon. Both substrates 11, 14 are then thermocompression-bonded. Next, a conductor layer 12 for heating is formed on the substrate 14 by using platinum paste and at the same time, platinum plaste is injected into the through-holes 14a-14c to electrically connect the lead wires 13a, 13c and both end portions of the conductor layer 2, after which insulation paste is further coated thereon and baked to lamination-form the insulator thin film layer 16, whereby the substrate for sensors is provided. |
