| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature controller capable of decreasing the evaporation loss of a medium without using a hermetically closed vessel. SOLUTION: This temperature controller 24 is composed of a vessel containing PFC 42 for a heat exchange, a circulating path 28 of PFC 42 passing through the electrode 20 of a plasma processing device 10, and a pump 30. If a liquid layer 40 separating from PFC 42 is formed above PFC 42, PFC 42 never comes into direct contact with the air, so that PFC 42 is hardly evaporated into the air and its evaporation loss is remarkably decreased.
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