Probe for testing semiconductor chips - is made from cold workable material formed into taper with perpendicular contact tip at narrowest end

摘要

The application is to test apparatus for use during semiconductor chip manufacture. The contact probe has small dimensions to permit a high density of probes in the test apparatus, and has high resistance to bending or deformation. The probe is made from a cold workable material, typically beryllium bronze. It is tapered on two opposite sides (2, 3) towards a point. At the narrowest end of the tapered section is formed a tip (11), approximately at right angles to the axis of the probe. The tapered section is preferably press-formed, and the tip section (9, 10, 11) cut or punched out of the tapered blank. Electrolytic machining may then be employed to obtain a smooth, rounded contact tip.