摘要 |
<p>PURPOSE:To avoid the change of the tensile force of the vibrating film which is caused by the temperature change, by forming the convexity of the vibrating film at the hole part of the frame. CONSTITUTION:Vibrating film 2 is put onto substrate 8, and frame 1 with the adhesive applied on its lower face is put onto film 2. Furthermore, substrate 10 is put on frame 1, and substrate 8 and 10 hold film 2 and frame 1 between. In this case, projection 9 of substrate 10 is inserted along with film 2 into the hole of frame 1. Under these conditions, frame 1 is ahdered to film 2. After the adhesion, film 2 is cut along the outer circumference of frame 1. As a result, part of film 2 is adhered to protrude into the hole of frame 1 since the size of the vibrating film at the hole part of frame 1 is a little larger than the distance at the clamping part of film 2. Accordingly, almost no change is caused to the tensile force of the vibrating film by the temperature change, and as a result the sensitivity is never lowered even at a low temperature.</p> |