| 摘要 |
<p>An apparatus with a vacuum system, said vacuum system including a vacuum chamber (11) adapted to contain main instruments ofthe apparatus, and an exhaust device (12) adapted to exhaust air from the vacuum chamber (11), which apparatus comprises a structure for vibration isolation adapted to prevent the transmission of the vibration of the exhaust device (12) to main section of the apparatus, in which structure said exhaust device (12) comprises a bellows (26) connected with the vacuum chamber (11), an exhaust tube (27) connected with the bellows (26) and a vaccum pump (28) attached to the exhaust tube (27); and the vaccum pump (28) are arranged to construct a pendulum system in which the bellows (26) is adopted for a fulcrum, whereby the vibrations of the vacuum pump (28) are absorbed by the pendulumn system and do not reach the main section of the apparatus.</p> |
