发明名称 |
Method of forming a short-channel field-effect transistor and field-effect transistor made by that method. |
摘要 |
<p>A field effect transistor (FET) with a very small effective channel length is made by using a first ion implantation to produce the source (18) and drain (19) regions of the FET and a second very shallow ion implantation (22) next to the source region (18) to produce the effective short channel of the FET. The effective channel of the FET is implanted to only a small fraction of the depth of the source and drain. This permits superior control over the threshold voltage of the FET and increases the operating speed of the FET. </p> |
申请公布号 |
EP0019119(A2) |
申请公布日期 |
1980.11.26 |
申请号 |
EP19800102234 |
申请日期 |
1980.04.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
JAMBOTKAR, CHAKRAPANI GAJANAN;WANG, PAUL POR-YUAN |
分类号 |
H01L21/033;H01L21/265;H01L29/08;H01L29/78;(IPC1-7):01L21/265;01L21/00;01L29/78 |
主分类号 |
H01L21/033 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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