Thin film piezoelectric element, method of manufacturing the same, and actuator

摘要

Two piezoelectric thin films each sandwiched between a main electrode layer and an opposite electrode layer are laminated in pairs to form a thin film piezoelectric element. An electrode leading area has a region in which the main electrode layer partially projects from the piezoelectric thin film, and another region in which only an insulating layer is formed on a part of the opposite electrode layer. At least one of a first opening formed through the insulating layer in the former region and a second opening formed through the insulating layer in the latter region is provided. Formed via the opening is a connection wiring for connecting to the opposite electrode layer or the main electrode layer and leading to the surface layer.