发明名称 |
METHOD OF FORMING OPTICAL IMAGES, DIFFRACTION ELEMENT FOR USE WITH THIS METHOD, APPARATUS FOR CARRYING OUT THIS METHOD |
摘要 |
An optical image is formed in a resist layer (5) by a number of sub-illuminations, in each of which an array of light valves (21-25) and a corresponding array of diffraction cells (91-95) are used to form a pattern of spots (111-115) in the resist layer according to a sub-image. Between the sub-illuminations, the resist layer is displaced relative to the arrays. Bright and well-defined spots are obtained by using diffraction cells having at least two amplitude levels and at least three phase levels. |
申请公布号 |
EP1459133(A1) |
申请公布日期 |
2004.09.22 |
申请号 |
EP20020804992 |
申请日期 |
2002.12.11 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
NELLISSEN, ANTONIUS, J., M. |
分类号 |
G02F1/13;G03F7/20;H01L21/027 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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