METHOD AND DEVICE FOR COVERING GRAPHITE CARBON BOARD WITH MINUTE SILICON CARBIDE FILM,申请号JP19790051122-传众专利搜索

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发明名称	METHOD AND DEVICE FOR COVERING GRAPHITE CARBON BOARD WITH MINUTE SILICON CARBIDE FILM
摘要
申请公布号	JPS55149180(A)	申请公布日期	1980.11.20
申请号	JP19790051122	申请日期	1979.04.24
申请人	KOKUSAI ELECTRIC CO LTD	发明人	KUROKAWA HARUSHIGE
分类号	C04B41/87;B28B11/04;C01B31/36;C23C16/32;H01L21/205	主分类号	C04B41/87
代理机构		代理人
主权项
地址

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