PATTERN INSPECTING APPARATUS,申请号JP19790057491-传众专利搜索

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发明名称	PATTERN INSPECTING APPARATUS
摘要
申请公布号	JPS55149003(A)	申请公布日期	1980.11.20
申请号	JP19790057491	申请日期	1979.05.10
申请人	FUJITSU LTD	发明人	ANDOU SANETOSHI
分类号	G01B11/00;G01B11/02;H01L21/66	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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