| 摘要 |
<p>A small ion source excellent in operability. The ion source comprises a tubular insulation tube (2) opened upward and opened at part of its lower surface, a plurality of hollow, tubular permanent magnets (3) provided on the outer peripheral surface of the insulation tube to be arranged in a row in the axial direction of the insulation tube, gas supplying means (34, 35, 20) for supplying gas into the insulation tube, a cathode electrode formed at the tip end thereof with a fitting unit (19) for fitting a solid material (18) thereto, an annular anode electrode (5) to be fitted to the opening in the lower surface of the insulation tube, an upper frame (6) for blocking the upper portion of the insulation tube and suspending the cathode electrode so as to allow the fitting unit to approach the anode electrode, and a lower frame (7) formed with an extracting port (37) for extracting ions emitted from the anode electrode and mounting thereon the insulation tube.</p> |
