| 摘要 |
A method and a system for processing cluster type plasma are provided to increase a plasma processing speed by organically coupling plural process chambers with one another. A system for processing a cluster type plasma includes a conveying module(10), plural process chambers(30a,30b,30c), and a transfer module(20). The conveying module loads a substrate to be processed on an empty tray and unloads the substrate from the tray after a plasma treatment process. The process chambers receive the trays, on which the substrate is loaded, and perform a plasma treatment process in a vacuum atmosphere. The transfer module transfers the tray, on which the substrate is loaded, from the conveying module to the process chamber. The transfer module includes a transfer robot, which moves the tray, on which the substrate is loaded, from the process chamber to the conveying module.
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