发明名称 V-Groove charge-coupled device
摘要 A charge-coupled device shift register is formed in V-grooves provided by anisotropically etching in a substrate. insulated conductive electrodes are provided perpendicular to the V-grooves to form a plurality of parallel shift registers which transfer charges along the length of the V-grooves.
申请公布号 US4234887(A) 申请公布日期 1980.11.18
申请号 US19790041975 申请日期 1979.05.24
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 VANDERSLICE, JR., WILBUR B.
分类号 H01L29/762;H01L21/339;H01L29/10;H01L29/768;(IPC1-7):H01L29/78;H01L29/06;H01L29/04;G11C19/28 主分类号 H01L29/762
代理机构 代理人
主权项
地址