发明名称 |
CMOS device and method of manufacture |
摘要 |
A CMOS device and manufacturing method thereof wherein a bilayer etch stop is used over a PMOS transistor, and a single etch stop layer is used for an NMOS transistor, for forming contacts to the source or drain of the CMOS device. A surface tension-reducing layer is disposed between the source or drain region of the PMOS transistor and an overlying surface tension-inducing layer. The surface tension-inducing layer may comprise a nitride material or carbon-containing material, and the surface tension-reducing layer may comprise an oxide material. Degradation of hole mobility in the PMOS transistor is prevented by the use of the surface tension-reducing layer of the bilayer etch stop.
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申请公布号 |
US7190033(B2) |
申请公布日期 |
2007.03.13 |
申请号 |
US20040826956 |
申请日期 |
2004.04.15 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHANG SUN-JAY;CHENG CHIEN-LI |
分类号 |
H01L29/76;H01L21/8238;H01L27/01 |
主分类号 |
H01L29/76 |
代理机构 |
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代理人 |
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地址 |
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