发明名称 Matching circuit for megasonic transducer device
摘要 A method and apparatus for matching impedance magnitude and impedance phase for an acoustic-wave transducer load and an RF power source. The acoustic-wave transducer load has a load impedance magnitude and phase. The RF power source has a source impedance magnitude and phase. In one embodiment of the invention, a transformer matches the source and load impedance magnitudes. A capacitor, connected in series with the transformer, matches the source impedance phase to the load impedance phase.
申请公布号 US7190103(B2) 申请公布日期 2007.03.13
申请号 US20050034475 申请日期 2005.01.12
申请人 发明人
分类号 H01L41/09;B06B1/02;H01L21/00;H03H7/40 主分类号 H01L41/09
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