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发明名称
摘要
申请公布号	JPS55159552(U)	申请公布日期	1980.11.15
申请号	JP19790057059U	申请日期	1979.05.01
申请人		发明人
分类号	H01L21/822;H01L21/331;H01L21/76;H01L21/761;H01L27/04;H01L29/06;H01L29/72;H01L29/73;(IPC1-7):H01L21/76	主分类号	H01L21/822
代理机构		代理人
主权项
地址

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