发明名称 AGING DEVICE FOR SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To improve element-loading capability and applicability, by enabling connection of input-and-output terminal to be freely switched on an aging substrate. CONSTITUTION:A semiconductor element for execution of operation aging is inserted into sockets 10a-10d. A connection pin 14a of an extended line 14 on input signal lines 12a-12b is connected to a connection terminal 13a requiring an input signal of wiring 13 extended from terminal of the sockets 10a-10d. This aging substrate 9 is put into a thermostatic tank 6, maintained at a constant temperature and provided with a prescribed power source voltage and input signal voltage for operation aging. By using this mechanism, it is possible to eliminate necessity of providing many wires on the aging substrate, so that larger number of elements become able to be loaded. Further, by providing in advance required number of wires for power source, grounding and input signal, it becomes possible to execute operation aging of many kinds of semiconductor elements simply by changing the terminal connection.
申请公布号 JPS55146938(A) 申请公布日期 1980.11.15
申请号 JP19790054355 申请日期 1979.05.02
申请人 CHO LSI GIJUTSU KENKYU KUMIAI 发明人 HAYASAKA YOSHIAKI;OOKURA ISAO
分类号 G01R31/26;G01R31/28;H01L21/326;(IPC1-7):01L21/326 主分类号 G01R31/26
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