| 摘要 |
PURPOSE:To automatically perform the supply or exchange of the treating liquid, by measuring the degree of fatigue of treating liquid in the immersing process such as cleaning and etching, through the provision of the projector and photo detector in the treating vessels. CONSTITUTION:The rays are radiated in the treating vessel 1 from the projector 2, and the rays transmitted through the treating liquid are received at the photo detector 3, and the signal is converted into an electric signal and input to the transparency detector 8. The detector 8 monitors the degree of transparency, and if the treating liquid is decreased and the water level is lowered than the height of the projector 2 and the photo detector 3, or if the treating liquid is fatigued to lower the degree of transparency for the rays, the command is given to the control section 9 from the detector 8, and both the electromagnetic valves 6, 7 and the liquid supply section 10 are controlled to supply the treating liquid or perform replacement. |
