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发明名称
HERSTELLUNGSVERFAHREN FÜR REAKTOR ZUR ZERSETZUNG VON GASEN
摘要
申请公布号
AT389042(T)
申请公布日期
2008.03.15
申请号
AT20050774994T
申请日期
2005.07.26
申请人
JOINT SOLAR SILICON GMBH & CO. KG
发明人
MUELLER, ARMIN;SILL, TORSTEN
分类号
C23C16/44;C01B33/027;C23C16/04;C23C16/24;C30B25/00;C30B29/06
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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