| 摘要 |
An improved semiconductor device having a gate electrode buried in a trench that a short circuit is hardly generated between a gate electrode and a source electrode at a termination of the gate electrode. A trench is formed in a semiconductor substrate. A gate electrode and a buried insulating film are buried in the trench. A source electrode is provided above the gate electrode via the buried insulating film. At the termination of the gate electrode, an interlayer insulating film is provided between the buried insulating film and the source electrode in such a way that the interlayer insulating film strides over the termination of the trench. Both of the buried insulating film and the interlayer insulating film function as an insulating film and prevent a short circuit at the termination of the gate electrode.
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