发明名称 SELF ALIGNED MULTI TURN TYPE APPARATUS FOR MANUFACTURING THIN FILM TAPE
摘要 A self-aligned multi-turn type apparatus for manufacturing a thin film tape is provided to manufacture a thin film tape having superior quality by uniformly depositing a thin film layer lengthwise and widthwise along the thin film tape. A self-aligned multi-turn type apparatus for manufacturing a thin film tape comprises a pair of reels which are spaced apart from each other, a roll assembly installed between the reels, and a tape type substrate. The roll assembly includes a plurality of rollers(100) having the same size and shape. Each roller has an outer peripheral surface(101-110) which is inclined downward with an inclination angle ranging from 0° to 90°.
申请公布号 KR100824670(B1) 申请公布日期 2008.04.28
申请号 KR20060118298 申请日期 2006.11.28
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 YOO, JAI MOO;CHUNG, KOOK CHAE;KO, JAE WOONG;KIM, YOUNG KUK;KIM, YOUNG HWAN
分类号 C23C14/00 主分类号 C23C14/00
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