| 摘要 |
PURPOSE:To enhance the film quality and mechanical properties of structural material boron used as an acoustic material, etc. and the production yield thereof by chemically vacuum-depositing boron on a substrate formed by covering a ground with a specified metal boride and by selectively removing the substrate. CONSTITUTION:Ground 1 such as Ta wire is covered with an alloy of Mn and one or more out of Cr, Fe, Co and Ni, alloy boride, Mn or Mn boride in a desired thickness to form boride layer 2. The resulting substrate is heated, and boron layer 3 of beta-rhombohedral or tetragonal crystal form or noncrystalline form is formed by a chemical vacuum deposition method. Te substrate is then selectively removed by chemical dissolution or mechanical peeling to obtain a structural material such as a pipe or a sheet composed mainly of boron element. By this method gap 4 is left between layers 3, 2 so a thermal strain between ground 1 and layer 3 is relieved to minimize occurrence of cracks, etc. in the material. |
