| 摘要 |
PURPOSE:To prevent the quality of plural collection containers from being lowered due to the scattering of slurry droplet by arranging them on the same flat plane. CONSTITUTION:The partition wall 71 is provided inside for each of plural, for example, three panels. The slurry droplet which is scattered from each of the panels 11 never enters another panel nor adheres to it. The collected slurry 19 flows into the slurry discharge port 62 which is provided on the lower part of the collection container 23 along the each partition wall 71 and the groove 72 by gravity. On the other hand, the collected slurry is automatically readjusted and is used repeatedly. |
