| 摘要 |
<p>PURPOSE:To prevent in advance an improper feeding of a dicing device by inspecting the change of a signal due to the existence or absence of a pattern by a monitor provided on the extension line of a dicing line and positioning the dicing line of the device. CONSTITUTION:The dicing position 4 before cutting is introduced into the visual field 6 of a detector by a feeder 4. The detector 8 detects the light amount of an image pattern 16 through an opening 16 perforated at the center 14 of cutting position by a photomultiplier 17. When a circuit pattern 20 is disposed on the cutting position 14, the output S of the photomultiplier is varied upon movement of a wafer 5, compared with predetermined set value C, and when the output S reaches the value C, the photomultiplier produces an error signal. The error signal is set by the value C every time a wafer 1 moves at one pitch and monitored at every one pitch. The brighter, the illumination is, the better the transmission rate of the optical system is, the better the resolution is, and the more vigorous the pattern step or reflectivity becomes, the better, the s/n ratio becomes and the reliability increases. Thus, by removing the dicing position detecting error, it can prevent the damage of the wafer.</p> |
