METHOD AND APPARATUS FOR SEPARATING AND RECOVERING HALIDE GAS

摘要

With using an apparatus for separating and recovering a halide gas from a mixed gas containing the halide gas comprising at least first and second multiple stage separation membrane modules, a mixed gas containing a halide gas is feeded to the gas inlet of the first stage separation membrane module, a permeate gas of the immediately preceding stage separation membrane module is feeded to the gas inlet of each of the second and the following stage separation membrane modules, the non-permeate gas of each of the second and the following stage separation membrane modules is recycled to the gas inlet of the first stage separation membrane module, and the halide gas as the non-permeate gas of the first stage separation membrane module is collected in high concentration at high recovery rate while controlling the non-permeate gas flow from the first stage separation membrane module with a gas flow control valve connected to the non-permeate gas outlet of the first stage separation membrane module.