发明名称 CONCAVE PORTION FORMING METHOD, CONCAVE-CONVEX PRODUCT MANUFACTURING METHOD, LIGHT-EMITTING ELEMENT MANUFACTURING METHOD, AND OPTICAL ELEMENT MANUFACTURING METHOD
摘要 <p>A concave portion forming method for forming concave portions in a heat-mode recording material layer whose shape is changeable comprises a concave portion forming step of forming a concave portion by irradiating the recording material layer with light collected from an optical system including a light source, an inspection light irradiating step of, during or after the formation of the concave portion in the recording material layer, irradiating the concave portion with inspection light, a detecting step of detecting the light quantity of the inspection light reflected or diffracted from the concave portion, and an output adjusting step of adjusting an output of the light source such that the light quantity reaches a predetermined value according to the light quantity (S1-S4). Moreover, a concave-convex product manufacturing method, a light-emitting element manufacturing method, and an optical element manufacturing method which use the above method are provided.</p>
申请公布号 WO2009050857(A1) 申请公布日期 2009.04.23
申请号 WO2008JP02817 申请日期 2008.10.07
申请人 FUJIFILM CORPORATION;USAMI, YOSHIHISA 发明人 USAMI, YOSHIHISA
分类号 G11B7/26;G03F7/20;H01L33/02 主分类号 G11B7/26
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