| 摘要 |
PURPOSE:To continuously and stably produce the subject homogeneous and high-quality photoreceptive member by forming a light receptive layer on the surface of a carrier fixed on a holder, and controlling the reflectivity of the inner surface of the holder in a specified range. CONSTITUTION:The cylindrical carrier 403 is fixed on the cylindrical holder 402, and set on a receiver 406 in a reaction vessel 401. The carrier 403 is heated by a heater 405 to a specified temp. through the holder 402. A raw gas is introduced into the reaction vessel 401 from a gas inlet pipe 407, and the vessel is evacuated to a specified pressure from an exhaust pipe 413. Under such conditions, an RF electrode 404 is connected to an RF power source 408 to generate a glow discharge, hence the raw gas is decomposed, and the light receptive layer is formed on the carrier 403. In the production of the photoreceptive member, the reflectivity of the inner surface of the holder 402 is repeatedly measured for each use, and the width between the maximum and minimum values of the reflectivity is controlled within + or -10% of the center value. By this method, the variations in the temp. of the carrier 403 are prevented. |
