发明名称 MEMS resonator and method of enhancing an output signal current from a MEMS resonator
摘要 The resonator comprises two capacitively coupled electrodes. One of the electrodes is made of a p-type doped semiconductor material, whereas the other electrode is made of an n-type doped semiconductor material. The invention also comprises a method of using this specific selection of the doping for enhancing the output signal current from a resonator.
申请公布号 US7579662(B2) 申请公布日期 2009.08.25
申请号 US20060582946 申请日期 2006.10.17
申请人 SEIKO EPSON CORPORATION 发明人 TANAKA KAZUAKI
分类号 H01S3/97 主分类号 H01S3/97
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