发明名称 |
Decreasing the porosity and surface roughness of ceramic substrates |
摘要 |
The porosity and surface roughness of ceramic substrates are improved by coating the surface with silicon compounds, drying the coated substrate, and then subjecting the substrate to elevated temperature so as to convert the silicon compounds to silicon oxides. Coated substrates obtained by the above process as well as specific preferred organosilane compositions are provided.
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申请公布号 |
US4230773(A) |
申请公布日期 |
1980.10.28 |
申请号 |
US19780966188 |
申请日期 |
1978.12.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BAKOS, PETER |
分类号 |
C04B41/84;C04B41/50;C04B41/87;H01L21/48;(IPC1-7):B05D3/02;B05D5/12;B32B9/04;C07F7/02 |
主分类号 |
C04B41/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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