| 摘要 |
PURPOSE: To produce a tough and porous non-evaporable getter by essentially removing hydrogen after a solid alloy body having a specified composition consisting of Zr, Y, Fe, Ni, Mn, Al, etc., is naturally pulverized as a hydride. CONSTITUTION: After an alloy consisting of, by weight, <=7% E (E consists of Fe, Ni, Mn and/or Al) 10-35% V, and the balance Zr is melted in a vacuum or an inert gas furnace, a solid alloy body is obtained by cooling. After the solid alloy body is charged in the chamber and air is essentially removed, a hydride is obtained by filling hydrogen. This filling is preferably done up to a level of hydrogen; 0.003-0.012 mol. Successively the alloy body is naturally pulverized to a hydrade powder or particulate. Successively, the powder or particulate is heated to 700-1,200 deg.C while in a dynamic vacuum or causing inert gas to flow, a non-evaporable getter is obtained by essentially removing hydrogen. Further, a tough and porous getter is produced by compacting/sintering the hydride powder or particulate.
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