ONSITE ULTRA HIGH PURITY CHEMICALS OR GAS PURIFICATION

摘要

Provided is a facility/system for on-site purification, intended to deliver high purity and ultrapure products such as treatment chemical substance and industrial and specific gas, with a production process exhibiting on-site turn down ratio ranging from 0-100% while maintaining the predetermined purity of supplied substances within a certain specification range. By re-inducing the products back into the on-site purification facility/system, it is possible to retain the liquid to vapor ratio in at least one of purification units, thereby keeping the purity range of the purified products intact.