| 摘要 |
A laser energy control circuit for a gas-discharge excited laser includes an energy source PSU to supply energy to the gas discharge. First circuit means TR1, TR2 operate to limit the energy supplied to a first value for a first time interval, after which second circuit means A1, A2 allow the energy to rise to a maximum value and then decrease gradually to a second value over a second time interval. Subsequently, third circuit means including amplifiers A3 to A6 operate to maintain the light output of the laser at a desired value. |
