| 摘要 |
PURPOSE:To obtain a clean box suitable for storing and transporting semi-finished products of electronic components by forming a circulation path by means of a partitioning plate provided in an airtight box and a fan fitted with a filter, and introducing into a purifying chamber an atomsphere stream which has passed through the filter. CONSTITUTION:A partitioning plate 8 is provided in an airtight box 7 so as to circulate an atmosphere stream, and a fan 9 is provided at one part of the circulation path. This circulation path starts from the fan 9, passes through a filter 10 and the purifying chamber 11 housing a work 1 as shown by arrows and dotted lines and returns to the fan 9. The fan 9 is driven by a motor 9a, which is driven by current from electric wire 12. By this, the work 1 is kept in a clean atmosphere so that it can be transported and stored in a processing chamber free from contamination. |
