| 摘要 |
PURPOSE:To provide a probe needle having preferable electric contact with any of a number of measuring points of an article to be measured in high density and wide range by providing a wavy stretchable portion between the sationary portion and a tip end formed on the same axis. CONSTITUTION:The stationary portion 1a and a tip end 1c of a probe needle 1 are formed on the same axis, and a stretchable portion 1b of wavy shape or the shape associated with the wavy shape is provided axially between the stationary portion 1a and the tip end 1c. The tip end 1c is tapered to be conical in shape with a vertex formed at the end. The needle 1 employs as its material a flat beryllium copper plate or the like having a thickness of approx. 50mu with appropriate elasticity, and formed in the above shape, for example by a photoetching process, heat treated 315 deg.C for approx. 2hr, quenched thereafter and gold plated. |
